熔融石英玻璃制备工艺研究进展

Research Status of the Preparation Technology of Fused Quartz Glass

  • 摘要: 石英玻璃作为国家战略性产业和支柱型产业中不可替代的高纯基础材料,得到了越来越多的关注。熔融石英玻璃是石英玻璃中产量最高的一类产品,具有原料来源广、制备工艺成熟、尺寸可控等优点。文章总结了熔融石英玻璃原料的晶格杂质、包裹体、粒度分布与颗粒形状对产品的影响,梳理了电熔法、气炼法和等离子体熔制法等熔融石英玻璃制备工艺现状及改进措施发展,提出了存在的问题及今后发展建议,为熔融石英玻璃产业的发展提供参考。

     

    Abstract: Quartz glass is a kind of high-purity basic material which is irreplaceable in national strategic and pillar industry and has drawn enough interests. Fused quartz glass occupied the highest production in quartz glass product industry for its extensive raw material, mature processing technique and size-controlled, etc. In this article, the effects of lattice impurities, inclusions, particle size distribution and crystal shape on fused quartz glass products were summarized in detail. Developments as well as improvements focused on electric melting method, flame fusion process, and plasma melting method in decades was induced. Above all, this work proposed the facing challenges in fused quartz glass industry and proposals for future reference.

     

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